A Study on Design of Controller Freedom Active Vibration Isolation System

INTRODUCTION Nano precision instruments with nanometer resolution are susceptible to disturbance transmitted mostly from ground vibration and mechanical vibration due to movements of the measuring instrument itself. These kinds of vibrations which are submicrometer level and low frequency distract both precision and accuracy of precision instruments. Six degree of freedom active vibration isolation system is required for these kinds of vibration. this system, control algorithms are very important factors of performance improvement. The system of this sort has coupling and system uncertainties due to changing of environment. The objective of this work is to design controllers which are PI controller and H-infinity controller for six degree of freedom active vibration isolation system and compare two controller through experiments.